JPH0249716Y2 - - Google Patents
Info
- Publication number
- JPH0249716Y2 JPH0249716Y2 JP2700388U JP2700388U JPH0249716Y2 JP H0249716 Y2 JPH0249716 Y2 JP H0249716Y2 JP 2700388 U JP2700388 U JP 2700388U JP 2700388 U JP2700388 U JP 2700388U JP H0249716 Y2 JPH0249716 Y2 JP H0249716Y2
- Authority
- JP
- Japan
- Prior art keywords
- wafers
- boat
- carrier
- holder
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 235000012431 wafers Nutrition 0.000 claims description 123
- 239000004065 semiconductor Substances 0.000 claims description 28
- 230000007246 mechanism Effects 0.000 description 14
- 238000012546 transfer Methods 0.000 description 12
- 238000000034 method Methods 0.000 description 10
- 239000011295 pitch Substances 0.000 description 10
- 239000004809 Teflon Substances 0.000 description 4
- 229920006362 Teflon® Polymers 0.000 description 4
- 230000008859 change Effects 0.000 description 3
- 210000000078 claw Anatomy 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000003028 elevating effect Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2700388U JPH0249716Y2 (en]) | 1988-02-29 | 1988-02-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2700388U JPH0249716Y2 (en]) | 1988-02-29 | 1988-02-29 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01130537U JPH01130537U (en]) | 1989-09-05 |
| JPH0249716Y2 true JPH0249716Y2 (en]) | 1990-12-27 |
Family
ID=31249131
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2700388U Expired JPH0249716Y2 (en]) | 1988-02-29 | 1988-02-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0249716Y2 (en]) |
-
1988
- 1988-02-29 JP JP2700388U patent/JPH0249716Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01130537U (en]) | 1989-09-05 |
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